A fluorinated ester monomer is provided having formula (1) wherein R
1
is H, CH
3
or CF
3
, R
2
and R
3
are H or a monovalent hydrocarbon group, or R
2
and R
3
forms a hydrocarbon ring, R
4
is a monovalent hydrocarbon group, and k is 0 or 1. A polymer obtained from the monomer has transparency to radiation with a wavelength of up to 200 nm and appropriate alkaline hydrolysis, is constructed such that any of water repellency, water slip and surface segregation may be adjusted by a choice of its structure, and is useful in forming ArF immersion lithography materials.
提供了一种
氟化酯单体,其
化学式为(1),其中R1为H、
CH3或
CF3,R2和R3为H或单价碳氢基团,或R2和R3形成碳氢环,R4为单价碳氢基团,k为0或1。从该单体中获得的聚合物具有对波长达200纳米的辐射透明度和适当的碱性
水解性,其结构可以通过选择来调节任何的防
水性、
水滑性和表面分离性,可用于制备ArF浸没光刻材料。