Salt suitable for an acid generator and a chemically amplified resist composition containing the same
申请人:Harada Yukako
公开号:US20060194982A1
公开(公告)日:2006-08-31
The present invention provides a salt of the formula (I)
wherein X represents —OH or —Y—OH, n shows an integer of 1 to 9, A
+
represents an organic counter ion, Y represents a divalent saturated aliphatic hydrocarbon group having 1 to 6 carbon atoms.
The present invention also provides a chemically amplified resist composition comprising the salt of the formula (I).