申请人:Ebata Takuma
公开号:US20110223537A1
公开(公告)日:2011-09-15
A radiation-sensitive resin composition includes a polymer, a photoacid generator, and an acid diffusion controller. The polymer includes a first repeating unit shown by a following formula (a-1). The acid diffusion controller includes at least one of a base shown by a following formula (C-1) and a photodegradable base,
wherein each R
1
represents a hydrogen atom or the like, R represents a monovalent group shown by an above formula (a′), each R
19
represents a chain hydrocarbon group having 1 to 5 carbon atoms or the like, A represents a divalent chain hydrocarbon group having 1 to 30 carbon atoms or the like, and m and n are integers from 0 to 3 (m+n=1 to 3),
wherein each of R
2
and R
3
represents a monovalent chain hydrocarbon group having 1 to 20 carbon atoms or the like.