Plasma developable negative resist compositions for electron beam, X-ray and optical lithography
申请人:TEXAS INSTRUMENTS INCORPORATED
公开号:EP0130088A2
公开(公告)日:1985-01-02
A negative resist composition including a polymeric matrix material, a polymerizable monomer, and an onium salt radiation sensitive initiator. The monomer is polymerized by irradiating the resist with an e-beam, x-ray, or ultraviolet source and heating the exposed resist. The resist is developed by a dry etchant such as plasma or a reactive ion etchant.