Perfluoro-1-(perfluoroethyl)cyclohexanesulfonic acid | 1135682-88-0

• 分子结构分类: 有机化合物 - 有机卤素化合物 - 磺酰卤
• 英文名称: Perfluoro-1-(perfluoroethyl)cyclohexanesulfonic acid
• 英文别名: 2,2,3,3,4,4,5,5,6,6-decafluoro-1-(1,1,2,2,2-pentafluoroethyl)cyclohexane-1-sulfonic acid
• CAS: 1135682-88-0
• 化学式: C₈HF₁₅O₃S
• 分子量: 462.13
• InChiKey: AGFWEBMALSMQMX-UHFFFAOYSA-N

物化性质

• 密度：
  1.93±0.1 g/cm3(Predicted)

计算性质

• 辛醇/水分配系数(LogP)：
  3.9
• 重原子数：
  27
• 可旋转键数：
  2
• 环数：
  1.0
• sp3杂化的碳原子比例：
  1.0
• 拓扑面积：
  62.8
• 氢给体数：
  1
• 氢受体数：
  18

文献信息

• Photoacid generators, chemically amplified resist compositions, and patterning process
  申请人：Ohsawa Youichi

  公开号：US20070292768A1

  公开（公告）日：2007-12-20

  A photoacid generator has formula (1). A chemically amplified resist composition comprising the photoacid generator has advantages including a high resolution, focus latitude, long-term PED dimensional stability, and a satisfactory pattern profile shape. When the photoacid generator is combined with a resin having acid labile groups other than those of the acetal type, resolution and top loss are improved. The composition is suited for deep UV lithography.

  一种光酸发生剂的化学式为（1）。包括该光酸发生剂的化学增感抗蚀组合物具有诸如高分辨率、焦点宽度、长期PED尺寸稳定性和令人满意的图案轮廓形状等优点。当该光酸发生剂与具有除了缩醛类型以外的酸敏感基团的树脂结合时，可以改善分辨率和顶部损失。该组合物适用于深紫外光刻。
• POSITIVE RESIST COMPOSITION AND PATTERNING PROCESS
  申请人：NISHI Tsunehiro

  公开号：US20100062374A1

  公开（公告）日：2010-03-11

  A positive resist composition comprises (A) a resin component which becomes soluble in an alkaline developer under the action of an acid and (B) an acid generator. The resin (A) is a polymer comprising recurring units containing a non-leaving hydroxyl group represented by formula (1) wherein R 1 is H, methyl or trifluoromethyl, X is a single bond or methylene, m is 1 or 2, and the hydroxyl group attaches to a secondary carbon atom. The composition is improved in resolution when processed by lithography.

  一种正性光刻胶组合物包括（A）在酸的作用下在碱性显影剂中变得可溶的树脂组分和（B）酸发生剂。树脂（A）是一种聚合物，包含由式（1）表示的非离去羟基的重复单元，其中R1为H、甲基或三氟甲基，X为单键或亚甲基，m为1或2，并且羟基连接到次级碳原子。当通过光刻工艺处理时，该组合物在分辨率方面得到改善。
• Fluoroalcohol preparation method, fluorinated monomer, polymer, resist composition and patterning process
  申请人：Hasegawa Koji

  公开号：US20070179309A1

  公开（公告）日：2007-08-02

  Fluoroalcohol compounds of formula (4) are prepared by reacting a fluorine compound of formula (1) with reducing agents or organometallic reagents of formulas (2) and (3) wherein R 1 is H or a monovalent C 1 -C 20 hydrocarbon group in which any —CH 2 — moiety may be replaced by —O— or —C(═O)—, R 2 is H or a monovalent C 1 -C 6 hydrocarbon group, R 3 and R 4 are H or a monovalent C 1 -C 8 hydrocarbon group, and M 1 is Li, Na, K, Mg, Zn, Al, B, or Si. From the fluoroalcohol compounds, fluorinated monomers can be produced in a simple and economic way, which are useful in producing polymers for the formulation of radiation-sensitive resist compositions.

  通过将化学式（1）的氟化合物与化学式（2）和（3）的还原剂或有机金属试剂反应制备化学式（4）的氟醇化合物，其中R1是H或一价的碳1-碳20烃基，其中任何一个—CH2—基团可能被—O—或—C(═O)—替代，R2是H或一价的碳1-碳6烃基，R3和R4是H或一价的碳1-碳8烃基，M1是Li、Na、K、Mg、Zn、Al、B或Si。通过这些氟醇化合物，可以简单经济地生产氟化单体，这些单体在制备用于辐射敏感抗蚀剂组合物的聚合物中非常有用。
• FLUORINATED MONOMER, FLUORINATED POLYMER, RESIST COMPOSITION AND PATTERNING PROCESS
  申请人：HASEGAWA Koji

  公开号：US20090035699A1

  公开（公告）日：2009-02-05

  Fluorinated monomers of formula (1) are useful in producing polymers for the formulation of radiation-sensitive resist compositions. R 1 is H or monovalent C 1 -C 20 hydrocarbon group, R 2 is H, F, methyl or trifluoromethyl, R 3 and R 4 are H or a monovalent C 1 -C 8 hydrocarbon group, or R 3 and R 4 may form an aliphatic hydrocarbon ring, and A is a divalent C 1 -C 6 hydrocarbon group.

  式（1）的氟化单体在制备用于辐射敏感抗蚀组合物的聚合物方面很有用。 R1是H或一价的C1-C20碳氢基团，R2是H，F，甲基或三氟甲基，R3和R4是H或一价的C1-C8碳氢基团，或R3和R4可以形成脂肪烃环，A是二价的C1-C6碳氢基团。
• Ester compounds and their preparation, polymers, resist compositions and patterning process
  申请人：Ohashi Masaki

  公开号：US20080008965A1

  公开（公告）日：2008-01-10

  Novel ester compounds having formulae (1) to (4) wherein A 1 is a polymerizable functional group having a carbon-carbon double bond, A 2 is oxygen, methylene or ethylene, R 1 is a monovalent hydrocarbon group, R 2 is H or a monovalent hydrocarbon group, any pair of R 1 and/or R 2 may form an aliphatic hydrocarbon ring, R 3 is a monovalent hydrocarbon group, and n is 0 to 6 are polymerizable into polymers. Resist compositions comprising the polymers as a base resin are thermally stable and sensitive to high-energy radiation, have excellent sensitivity and resolution, and lend themselves to micropatterning with electron beam or deep-UV.

  具有以下化学式（1）至（4）的新酯化合物，其中A1是具有碳-碳双键的可聚合官能团，A2是氧、亚甲基或乙烯基，R1是一价碳氢基团，R2是氢或一价碳氢基团，任意一对R1和/或R2可能形成脂肪烃环，R3是一价碳氢基团，n为0至6，可聚合成聚合物。作为基础树脂的聚合物组成物具有热稳定性，并对高能辐射敏感，具有出色的敏感度和分辨率，并适用于电子束或深紫外微图案化。