MOLECULAR GLASS OF SPIROFLUORENE DERIVATIVE, PREPARATION METHOD THEREOF AND USE THEREOF IN PHOTO-ETCHING
申请人:TECHNICAL INSTITUTE OF PHYSICS AND CHEMISTRY OF THE CHINESE ACADEMY OF SCIENCES
公开号:US20150353468A1
公开(公告)日:2015-12-10
Disclosed is a molecular glass of a spirofluorene derivative having a molecular structure as follows: formula (I),
wherein each of R
1
-R
12
is a hydrogen atom, a hydroxyl group, a methoxyl group or an acid-sensitive substituent; substituents R
1
˜R
12
can be identical or different, but on the same benzene ring the substituents cannot all be hydrogen atoms. The molecular glass has a good solubility in various polar solvents, is suitable to be made into a film; meanwhile the molecular glass has a very high glass transition temperature and meets the requirements of the photolithography processing technology. Also disclosed is a preparation method of the above-mentioned molecular glass of a spirofluorene derivative. The synthetic process of the method is simple and suitable for industrialization. Further disclosed is the use of a photo-resist with the above-mentioned molecular glass as a main material in photo-etching, wherein the molecular glass of a spirofluorene derivative with hydroxyl groups (or partly with hydroxyl groups) on the periphery thereof can be used as a negative photo-resist, and the molecular glass with the hydroxyl groups on the periphery thereof protected (or partly protected) by an acid-sensitive substituent can be used as a positive photo-resist.
揭示了一种螺氟萘衍生物的分子玻璃,其分子结构如下:式(I),其中R1-R12中的每一个是氢原子、羟基、甲氧基或酸敏感取代基;取代基R1~R12可以相同也可以不同,但在同一苯环上,取代基不能全为氢原子。该分子玻璃在各种极性溶剂中具有良好的溶解性,适用于制成薄膜;同时,该分子玻璃具有非常高的玻璃转变温度,符合光刻工艺技术的要求。还公开了上述螺氟萘衍生物的分子玻璃的制备方法。该方法的合成过程简单,适合工业化生产。进一步公开了将上述分子玻璃作为主要材料的光刻用光刻胶的用途,其中,带有羟基(或部分带有羟基)的螺氟萘衍生物分子玻璃可用作负光刻胶,而带有酸敏感取代基保护的(或部分保护的)带有羟基的螺氟萘衍生物分子玻璃可用作正光刻胶。