Aluminum oxide-induced gas-phase ring-opening in methyl substituted gem-difluorocyclopropanes, leading to 2-fluorobuta-1,3-dienes and vinylacetylenes
作者:N. V. Volchkov、M. B. Lipkind、M. A. Novikov、O. M. Nefedov
DOI:10.1007/s11172-015-0914-6
日期:2015.3
A gas-phase pyrolysis of methyl-substituted gem-difluorocyclopropanes in a flow-tube reactor in the presence of Al2O3 at 185—250 °C gives 2-fluorobuta-1,3-dienes and vinylacetylenes.
在流管反应器中,在 Al2O3 存在下,在 185-250 °C 下,甲基取代的偕二氟环丙烷的气相热解得到 2-氟丁-1,3-二烯和乙烯基乙炔。
PLASMA ETCHING GAS AND PLASMA ETCHING METHOD
申请人:Ito Azumi
公开号:US20140306146A1
公开(公告)日:2014-10-16
The present invention is an etching gas comprising an unsaturated fluorohydrocarbon represented by C
x
H
y
F
z
(wherein x=3, 4, or 5, y+z≦2x, and y>z) and a method comprising selectively etching a silicon nitride film relative to a silicon oxide film or a silicon film using the etching gas. According to the present invention, a silicon nitride film stacked on a silicon oxide film or a silicon film can be highly selectively etched.