A polymerizable monomer of the present invention is represented by the following formula (1);
R
1
, R
2
and R
3
are each a hydrogen atom, a fluorine atom, an alkyl group or a fluoroalkyl group, W is a single bond or a linkage group and n is 0 or 1, where at least one of R
1
, R
2
and R
3
is a fluorine atom or a fluoroalkyl group when n=
1;
and the ring in the formula may have a substituent. The polymerizable monomer of the present invention can provide an appropriate hydrophilicity or hydrophilicity and transparency to a photoresist polymer.
本发明的可聚合单体由以下公式(1)表示;其中,R1、R2和R3分别为氢原子、
氟原子、烷基或氟烷基,W为单键或连接基,n为0或1,当n=1时,R1、R2和R3中至少有一个为
氟原子或氟烷基;公式中的环可能具有取代基。本发明的可聚合单体能够为光刻胶聚合物提供适当的亲
水性或亲疏
水性和透明度。