A highly efficient method for cleaning a substrate, whereby in the cleaning of the substrate, ① in a short time, ② both particle contaminants and metal contaminants can be removed, and ③ a problem associated therewith, such as re-deposition of contaminants or a dimensional change due to etching, can be remarkably reduced, and which has the following characteristics.
A method for cleaning a surface of a substrate, which comprises at least the following steps (1) and (2),
wherein the step (2) is carried out after carrying out the step (1):
Step (1): A cleaning step of cleaning the surface of the substrate with an alkaline cleaning agent containing a complexing agent, and
Step (2): A cleaning step employing a cleaning agent having a hydrofluoric acid content C (wt%) of from 0.03 to 3 wt%, wherein the cleaning time t (seconds) of the substrate with said cleaning agent is at most 45 seconds, and C and t satisfy the relationship of 0.25≦tC1.29≦5.
一种清洗基片的高效方法,在清洗基片的过程中,①在短时间内,②颗粒污染物和
金属污染物都能被清除,③与之相关的问题,如污染物的再沉积或由于蚀刻引起的尺寸变化,可以显著减少,该方法具有以下特点。
一种清洁基底表面的方法,至少包括以下步骤(1)和(2)、
其中步骤(2)在步骤(1)之后进行:
步骤 (1):用含有络合剂的碱性清洗剂清洗基底表面的清洗步骤,以及
步骤 (2):使用
氢氟酸含量 C(重量百分比)为 0.03 至 3 重量百分比的清洗剂的清洗步骤,其中使用所述清洗剂清洗基底的时间 t(秒)最多为 45 秒,且 C 和 t 满足 0.25≦tC1.29≦5。