Disclosed is a stamp (14) for an imprint lithography process, the stamp comprising an elastomer stamp body including a polysiloxane bulk portion (110) and a patterned surface comprising a feature pattern (16) for imprinting an imprinting composition (12) wherein the elastomer stamp body comprises a basic organic amine in an amount of at least 0.1% by weight based on the total weight of the elastomer stamp body. Also disclosed are methods of manufacturing such a stamp, and a method of forming a patterned layer on a substrate using such a stamp.
公开了一种用于压印光刻工艺的印章 (14),该印章包括弹性体印章本体,其中包括聚
硅氧烷主体部分 (110) 和图案表面,图案表面包括用于压印压印组合物 (12) 的特征图案 (16),其中弹性体印章本体包括碱性有机胺,其用量至少为弹性体印章本体总重量的 0.1%(按重量计)。还公开了制造这种印章的方法,以及使用这种印章在基底上形成图案层的方法。