COMPOUND, POLYMERIC COMPOUND, ACID GENERATOR, RESIST COMPOSITION, AND METHOD OF FORMING RESIST PATTERN
申请人:Komuro Yoshitaka
公开号:US20120270155A1
公开(公告)日:2012-10-25
There are provided a novel compound, a polymeric compound, a resist composition, an acid generator and a method of forming a resist pattern
the compound represented by general formula (1-1):
wherein each of R
1
and R
3
independently represents a single bond or a divalent linking group; A represents a divalent linking group; each of R
2
and R
4
independently represents a hydroxyl group, a hydrocarbon group which may have a substituent, or a group represented by general formula (1-an1), (1-an2) or (1-an3), provided that at least one of R
2
and R
4
represents a group represented by general formula (1-an1), (1-an2) or (1-an3); and n0 is preferably 0 or 1, and
wherein Y
1
represents a single bond or —SO
2
—; R
5
represents a linear or branched monovalent hydrocarbon group of 1 to 10 carbon atoms, cyclic monovalent hydrocarbon group of 3 to 20 carbon atoms or monovalent hydrocarbon group of 3 to 20 carbon atoms having a cyclic partial structure which may be substituted with a fluorine atom; and M
+
represents an organic cation or a metal cation,
本文提供了一种新型化合物、一种聚合物化合物、一种抗蚀组合物、一种酸发生剂以及一种形成抗蚀图案的方法。该化合物由通式(1-1)表示,其中R1和R3各自独立地表示单键或二价连接基;A表示二价连接基;R2和R4各自独立地表示羟基、可能具有取代基的碳氢基或由通式(1-an1)、(1-an2)或(1-an3)表示的基团,但至少其中一个R2或R4表示由通式(1-an1)、(1-an2)或(1-an3)表示的基团;n0最好为0或1;其中Y1表示单键或—SO2—;R5表示1至10个碳原子的线性或支链一价碳氢基、3至20个碳原子的环状一价碳氢基或带有可能被氟原子取代的环状部分结构的3至20个碳原子的一价碳氢基;M+表示有机阳离子或金属阳离子。