A styrene polymer represented by formula (1), terminated with P, and having a weight average molecular
1
wherein R is OH or OR
3
, R
1
is H or CH
3
, R
2
is alkyl, R
3
is acid labile group, x≧0, y>0, k≧0, m≧0, n>0, 0
由式(1)代表的苯乙烯聚合物,以 P 结尾,其重量平均分子为
1
其中 R 是 OH 或 OR
3
, R
1
是 H 或 CH
3
, R
2
是烷基,R
3
是酸性基团,x≧0, y>0, k≧0, m≧0, n>0, 0
Styrene polymers, chemically-amplified positive resist compositions, their preparation and use in a patterning process
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:EP0908473B1
公开(公告)日:2006-02-01
US4513004A
申请人:——
公开号:US4513004A
公开(公告)日:1985-04-23
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