申请人:Sumitomo Chemical Company, Limited
公开号:US06245478B1
公开(公告)日:2001-06-12
A resist composition exhibiting an improved profile performance without impairing the resolution, the sensitivity, etc. which comprises a binder component; a radiation-sensitive component; and a succinimide compound represented by the following formula (I):
wherein Q1 represents an alkyl group which may be optionally substituted with alkoxy, halogen or nitro, an alicyclic hydrocarbon residue, an aryl group, or an aralkyl group; and Q2, which may be the same as or different from Q1, represents hydrogen, an alkyl group which may be optionally substituted with alkoxy, halogen or nitro, an alicyclic hydrocarbon residue, an aryl group, or an aralkyl group.
一种抗蚀组合物,表现出改善的轮廓性能,而不损害分辨率、灵敏度等,包括粘合剂成分;辐射敏感成分;以及由以下式(I)表示的琥珀酰亚胺化合物:其中Q1表示一种可以选择性地用烷氧基、卤素或硝基取代的烷基、脂环烃残基、芳基或芳基烷基;而Q2,可以与Q1相同或不同,表示氢、可以选择性地用烷氧基、卤素或硝基取代的烷基、脂环烃残基、芳基或芳基烷基。