respectively, in the formation of triplet α,2- and α,4-DHTs, whose diradicalreactivity led to both radical and polar products. On the other hand, irradiation of the meta-precursor led to the singlet α,3-DHT isomer. The latter showed a marked preference for the formation of polar products and this was rationalized, as supported by computational evidence, via the involvement of a zwitterionic species arising through
Benzylbis(dimethylglyoximato)pyridinecobalt(III) reacts with bromotrichloromethane at from 50 to 90°C in chloroform to give good yields of trichloroethylbenzene, which are higher when imidazole is present in the reaction mixture. Methyl- and polymethyl-substituted benzylbis(dimethylglyximato)pyridinecobalt(III) complexes give higher yields of the corresponding trichloroethylarenes (85–90%), whereas
A radiation-sensitive resin composition comprising an acid-labile group-containing resin and a photoacid generator is disclosed. The resin has a structure of the formula (1),
1
wherein R
1
represents a hydrogen atom, a monovalent acid-labile group, an alkyl group having 1-6 carbon atoms which does not have an acid-labile group, or an alkylcarbonyl group having 2-7 carbon atoms which does not have an acid-labile group, X
1
represents a linear or branched fluorinated alkyl group having 1-4 carbon atoms, and R
2
represents a hydrogen atom, a linear or branched alkyl group having 1-10 carbon atoms, or a linear or branched fluorinated alkyl group having 1-10 carbon atoms. The resin composition exhibits high transmittance of radiation, high sensitivity, resolution, and pattern shape, and is useful as a chemically amplified resist in producing semiconductors at a high yield.
A resist composition which can easily form a resist pattern excellent in transparency for vacuum ultraviolet rays such as an F
2
excimer laser or the like and dry etching characteristics and further excellent in sensitivity, resolution, flatness, thermal resistance and the like, is provided. The resist composition, characterized by comprising (A) a fluorine-containing polymer having an acidic group blocked with a blocking group containing a cycloalkyl group, an organic group having one or more of cycloalkyl groups, a bicycloalkyl group or the like, (B) an acid generating compound capable of generating an acid by irradiation with a light, and (C) an organic solvent.
申请人:SHELL INTERNATIONALE RESEARCH
MAATSCHAPPIJ B.V.
公开号:EP0337815A1
公开(公告)日:1989-10-18
Certain novel 1-dimethylcarbamoyl-3-substituted-5-substituted-1H-1,2, 4-triazoles are insecticidally active and can be used, optionally in compositions also containing agronomically acceptable diluent or carrier, to combat insects, especially insects of the order Homoptera.