The present invention is to provide a fluorine-containing polymer having excellent light transmission in the vacuum ultraviolet region of not more than 193 nm, a monomer favorably used for preparing the fluorine-containing polymer, a process for preparing the fluorine-containing polymer, and uses of the fluorine-containing polymer. The fluorine-containing polymer has at least a repeated unit structure represented by the following formula (1) and has an absorption coefficient of not more than 3.0 &mgr;m
−1
at 157 nm of ultraviolet rays.
1
wherein R
1
to R
12
are each fluorine, a fluorine-containing alkyl group of 1 to 20 carbon atoms, or the like; X
1
is —CR
a
R
b
—, —NR
a
— or —PR
a
— (R
a
and R
b
are each fluorine, a fluorine-containing alkyl group of 1 to 20 carbon atoms, hydrogen, —O—, —S—, an alkyl group of 1 to 20 carbon atoms, or the like); at least one of R
1
to R
12
and X
1
is fluorine or a fluorine-containing group; and n is 0 or an integer of 1 to 3.
本发明旨在提供一种在不超过 193 纳米的真空紫外区具有优异透光性的含
氟聚合物、一种可用于制备该含
氟聚合物的单体、一种制备该含
氟聚合物的工艺以及该含
氟聚合物的用途。含
氟聚合物至少具有下式(1)表示的重复单元结构,其吸收系数不超过 3.0 &mgr;m
-1
在 157 纳米紫外线下的吸收系数不超过 3.0 &mgr;m -1 。
1
其中 R
1
至 R
12
各自为
氟、1 至 20 个碳原子的含氟烷基或类似物; X
1
是-CR
a
R
b
-,-NR
a
- 或-PR
a
- (R
a
和 R
b
均为
氟、1 至 20 个碳原子的含氟烷基、氢、-O-、-S-、1 至 20 个碳原子的烷基或类似基团);R
1
至 R
12
和 X
1
是
氟或含
氟基团;以及 n 是 0 或 1 至 3 的整数。