FLUORINATED ESTER MONOMER, MAKING METHOD, FLUORINATED ESTER POLYMER, AND DIFLUOROHYDROXYCARBOXYLIC ACID
申请人:KINSHO Takeshi
公开号:US20120083580A1
公开(公告)日:2012-04-05
A fluorinated ester monomer is provided having formula (1) wherein R
1
is H, CH
3
or CF
3
, R
2
and R
3
are H or a monovalent hydrocarbon group, or R
2
and R
3
forms a hydrocarbon ring, R
4
is a monovalent hydrocarbon group, and k is 0 or 1. A polymer obtained from the monomer has transparency to radiation with a wavelength of up to 200 nm and appropriate alkaline hydrolysis, is constructed such that any of water repellency, water slip and surface segregation may be adjusted by a choice of its structure, and is useful in forming ArF immersion lithography materials.
Fluorinated ester monomer, making method, fluorinated ester polymer, and difluorohydroxycarboxylic acid
申请人:Kinsho Takeshi
公开号:US08697903B2
公开(公告)日:2014-04-15
A fluorinated ester monomer is provided having formula (1) wherein R1 is H, CH3 or CF3, R2 and R3 are H or a monovalent hydrocarbon group, or R2 and R3 forms a hydrocarbon ring, R4 is a monovalent hydrocarbon group, and k is 0 or 1. A polymer obtained from the monomer has transparency to radiation with a wavelength of up to 200 nm and appropriate alkaline hydrolysis, is constructed such that any of water repellency, water slip and surface segregation may be adjusted by a choice of its structure, and is useful in forming ArF immersion lithography materials.