申请人:PROMERUS, LLC
公开号:US10712661B2
公开(公告)日:2020-07-14
Various compositions encompassing polymers containing acidic pendent groups in combination with one or more reactive olefinic compounds and a photoacid generators form self-imagable negative tone films. Examples of such polymers include polymers and copolymers containing norbornene-type repeating units having acidic pendent groups, ring opened maleic anhydride polymers, polyacrylic acid, polyhydroxystyrene polymers, and the like. The films formed from such compositions provide self imagable, low-k, thermally stable layers for use in microelectronic and optoelectronic devices, among other applications.
含有酸性悬垂基团的聚合物与一种或多种活性烯烃化合物和光酸发生器的各种组合物可形成自显影负色调薄膜。此类聚合物的例子包括含有酸性悬垂基团的降冰片烯类重复单元的聚合物和共聚物、开环马来酸酐聚合物、聚丙烯酸、聚羟基苯乙烯聚合物等。由此类组合物形成的薄膜具有自显影性、低 K 值、热稳定性,可用于微电子和光电设备及其他应用中。