A resist composition comprising a binder resin and a radiation-sensitive compound. The binder resin is an alkali-soluble resin or becomes alkali-soluble resin by the action of the radiation-sensitive compound after irradiation, and has a polymerization unit represented by the following formula (I):
1
wherin, R
1
represents a fluoroalkyl group having 1 to 12 carbon atoms and having at least one fluorine atom, and R
2
represents hydrogen atom or an acyl group having 2 to 5 carbon atoms.
一种抗蚀剂组合物,由粘合剂
树脂和辐射敏感化合物组成。粘合剂
树脂是碱溶性
树脂,或在辐照后在辐射敏感化合物的作用下成为碱溶性
树脂,并具有下式(I)所代表的聚合单元:
1
其中,R
1
代表具有 1 至 12 个碳原子且至少有一个
氟原子的氟烷基,以及 R
2
代表氢原子或具有 2 至 5 个碳原子的酰基。