A radiation sensitive resin composition which can be processed and molded at low temperatures and has resolution, solvent resistance, adhesion to a substrate and storage stability required as an interlaminar insulating film.
This radiation sensitive resin composition comprises:
(A) a copolymer obtained by copolymerizing (a1) an unsaturated carboxylic acid and/or an unsaturated carboxylic anhydride, (a2) an epoxy compound such as β-methylglycidyl acrylate and/or an epoxy compound such as a monomer represented by the following formula (3):
and (a3) an olefinic unsaturated compound other than the above (a1) and (a2); and
(B) a 1,2-quinonediazide compound.
一种辐射敏感
树脂组合物,可在低温下加工和成型,并具有作为层间绝缘薄膜所需的分辨率、耐溶剂性、与基材的粘附性和储存稳定性。
这种辐射敏感
树脂组合物包括
(A) 由以下单体共聚而得的共聚物:(a1) 不饱和
羧酸和/或不饱和
羧酸酐;(a2) 环氧化合物,如
丙烯酸 β-甲基
缩水甘油酯和/或环氧化合物,如下式(3)所代表的单体:
和(a3) 除上述(a1)和(a2)之外的烯烃不饱和化合物;和
(B) 1,2-醌
噻嗪化合物。