研究了在闪蒸真空热解条件下选定的N-,O-和S-杂环的硫酮的热分解。在六元4 H -3,1-苯并沙丁胺-4-硫酮6的情况下,反应过程取决于C(2)处的取代模式(方案3)。因此,该2-未取代的衍生物6a导致不稳定的产物2,该产物在用MeOH处理后被定量地转化为2-巯基苯甲酸甲酯(7)。对2,2-二甲基衍生物6b进行类似的热解,得到2-甲基-4 H -1-苯并噻喃-4-硫酮(8),为唯一产物。就硫邻苯二甲酸酯衍生物而言参照图15,观察到气相中的热重排以高收率产生相应的苯并[ c ]噻吩-1(3H)-酮16(方案6)。出乎意料的是,1,3-氧硫杂环戊烷-5-酮的硫化17与劳森标准条件下的试剂导致1,2-二硫杂环丁烷衍生物19,其中,气相热解后,进行了扩环,得到3- ħ - 1,2-二硫醇20(方案7)。六元4 H -1,3-苯并噻嗪-4-硫酮21显示出三种产物:菲咯[9,10- c] -1,2-二硫醚(22),3
POLYMER HAVING A STRUCTURE OF POLYAMIDE, POLYAMIDE-IMIDE, OR POLYIMIDE, PHOTOSENSITIVE RESIN COMPOSITION, PATTERNING PROCESS, PHOTOSENSITIVE DRY FILM, AND PROTECTIVE FILM FOR ELECTRIC AND ELECTRONIC PARTS
申请人:SHIN-ETSU CHEMICAL CO., LTD.
公开号:US20200041903A1
公开(公告)日:2020-02-06
The present invention is a polymer having a polyamide structural unit, a polyamide-imide structural unit, or a polyimide structural unit, selected from a polyamide, a polyamide-imide, a polyimide, a polyimide precursor, a polybenzoxazole, and a polybenzoxazole precursor, including a reaction product of a diamine containing at least one of a diamine shown by the following general formula (1) and a diamine shown by the following general formula (2), together with at least one of a tetracarboxylic dianhydride shown by the following general formula (3) as well as a dicarboxylic acid and a dicarboxylic halide shown by the following general formula (4). This provides a polymer which is soluble in a safe organic solvent used widely, and is usable as a base resin of a positive photosensitive resin composition that is soluble in an aqueous alkaline solution and capable of forming a fine pattern to give higher resolution.