申请人:Mitsubishi Gas Chemical Company, Inc.
公开号:EP2911002A1
公开(公告)日:2015-08-26
A resist composition of the present invention is a resist composition containing a resist base material and a solvent. The resist base material contains a specific stereoisomer. A content of the specific stereoisomer in the resist base material is 50 to 100% by mass.
本发明的抗蚀剂组合物是一种含有抗蚀剂基料和溶剂的抗蚀剂组合物。光刻胶基料含有特定的立体异构体。光刻胶基料中特定立体异构体的含量为 50%至 100%(按质量计)。