CROSSLINKING AGENT, NEGATIVE RESIST COMPOSITION, AND PATTERN FORMING METHOD USING THE NEGATIVE RESIST COMPOSITION
申请人:Okuyama Kenichi
公开号:US20120115084A1
公开(公告)日:2012-05-10
Disclosed are a negative resist composition which shows excellent sensitivity and resolution in pattern formation by exposure to electron beams or EUV, a novel crosslinking agent suitable for the resist composition, and a pattern forming method using the resist composition.
The negative resist composition comprises: (A) a polyphenol compound comprising two or more phenolic hydroxyl groups in a molecule thereof and having a molecular weight of 300 to 3,000, (B) an acid generator which directly or indirectly produces acid by exposure to active energy rays having a wavelength of 248 nm or less, and (C) a crosslinking agent represented by the following chemical formula (1).
(The symbols shown in the formula (1) are defined in the Description).
Superlattice Engineering with Chemically Precise Molecular Building Blocks
作者:Xiao-Yun Yan、Qing-Yun Guo、Xian-You Liu、Yicong Wang、Jing Wang、Zebin Su、Jiahao Huang、Fenggang Bian、Haixin Lin、Mingjun Huang、Zhiwei Lin、Tong Liu、Yuchu Liu、Stephen Z. D. Cheng
DOI:10.1021/jacs.1c09831
日期:2021.12.29
emergence. In the current work, we demonstrate that properly designed molecular systems could generate a spectrum of unconventional superlattices. Four categories of giant molecules are presented. We systematically explore the lattice-forming principles in unary and binary systems, unveiling how molecular stoichiometry, topology, and size differences impact the mesoatoms and further toward their superlattices
Hydroxyphenylbenzene derivatives as glass forming molecules for high resolution photoresists
作者:Anuja De Silva、Christopher K. Ober
DOI:10.1039/b719108a
日期:——
This paper presents a fundamental study to relate molecular architecture to the amorphous properties of hydroxyphenylbenzene molecular glass derivatives. These studies demonstrates that the branched hydroxyphenylbenzene derivatives can form stable molecular glasses despite the π–π interactions present. Through this research, design concepts to stabilize the amorphous nature and to increase the glass transition temperature (Tg) based on asymmetric molecular structures, bulky substituents, conformation states and molecular size are explored. An understanding of such behavior is important for the development of hydroxyphenylbenzene derivatives as potential molecular photoresists for patterning below 50 nm. This research has helped to identify potential candidates to be evaluated as positive-tone photoresists for lithographic applications for extreme ultraviolet (EUV, λ = 13.4 nm) lithography. The first reported sub-30 nm feature sizes for hydroxyphenylbenzene derivatives were demonstrated with high Tg materials.
Self-assembly of a novel functional molecule: 1,2,4,5-tetra(p-hydroxyphenyl)benzene
作者:Yunxia Yang、Ke Li、Surong Luo、Qi Li
DOI:10.1016/j.molstruc.2010.01.046
日期:2010.4
tetraaryl-substituted benzene, 1,2,4,5-tetra(p-hydroxyphenyl)benzene (C30H22O4, TetHPB), has been synthesized. Its crystalline hydrate C30H22O4·2H2O (1) and the inclusioncompound of its anions with the tetrapropylammonium cations, [(C30H21O4)2H]−·(n-C3H7)4N+ (2), have been prepared and characterized by single crystal X-ray diffraction. The results of the structural study show that the four peripheric para hydroxyl
摘要 合成了一种新的刚性四芳基取代苯,1,2,4,5-四(对羟基苯基)苯(C30H22O4,TetHPB)。其结晶水合物 C30H22O4·2H2O (1) 及其阴离子与四丙基铵阳离子的包合物 [(C30H21O4)2H]-·(n-C3H7)4N+ (2) 已制备并通过单晶 X 射线表征衍射。结构研究结果表明,TetHPB 分子的四个外围对羟基苯环围绕芳基-芳基键扭转并采用 X 形构型,从而避免了空间拥塞。在 1 个氢键的 TetHPB 链的晶体结构中,通过溶剂水分子介导的氢键和 C–H…π 相互作用连接到 3D 结构。在化合物 2 中,TetHPB 阴离子构建了基于 O-H…O 氢键的阴离子排列。所得主体包含容纳四丙基铵阳离子的空腔,从而形成通道状包合物。这些结果表明,TetHPB 分子允许构建带有空腔的氢键网络;共结晶的水分子可能会在这些扩展结构的形成中发挥作用。