申请人:TOKYO OHKA KOGYO CO., LTD.
公开号:US20190204739A1
公开(公告)日:2019-07-04
A resist composition containing a compound (B1) represented by Formula (b1) in which R
b1
represents a monovalent hydrocarbon group which has a steroid skeleton and 17 to 50 carbon atoms, Y
b1
and Y
b2
each independently represent a divalent linking group having a hetero atom, V
b1
represents a divalent linking group containing a cyclic aliphatic hydrocarbon group, V
b2
represents an alkylene group, a fluorinated alkylene group, or a single bond, R
f1
represents a hydrogen atom, a fluorine atom, or a fluorinated alkyl group having 1 to 5 carbon atoms, m represents an integer of 1 or greater, and M
m+
represents an m-valent organic cation
一种包含化合物(B1)的抗蚀组合物,其中Rb1代表具有类固醇骨架和17至50个碳原子的一价碳氢基团,Yb1和Yb2各自独立代表具有杂原子的双价连接基团,Vb1代表含有环状脂肪碳氢基团的双价连接基团,Vb2代表烷基基团、氟化烷基基团或单键,Rf1代表氢原子、氟原子或具有1至5个碳原子的氟化烷基基团,m代表大于等于1的整数,Mm+代表m价有机阳离子。