申请人:SUMITOMO CHEMICAL COMPANY, LIMITED
公开号:US20210389672A1
公开(公告)日:2021-12-16
Disclosed are a compound represented by formula (I), a resin and a resist composition:
wherein R
1
represents an alkyl group which may have a halogen atom, a hydrogen atom or a halogen atom; L
1
represents a single bond or —CO—O*; R
3
represents an alkyl group, and —CH
2
— included in the group may be replaced by —O— or —CO; R
4
represents a fluorine atom, an alkyl fluoride group or an alkyl group, and —CH
2
—included in the alkyl fluoride group and the alkyl group may be replaced by —O— or —CO—; R
5
represents a hydrogen atom, an alkylcarbonyl group or an acid-labile group; m2 and m3 represent an integer of 1 to 3, m4 represents an integer of 0 to 2, and m5 represents 1 or 2, in which 3≤m2+m3+m4+m5≤5.