A polishing liquid for polishing a surface to be polished containing a tungsten material, the polishing liquid comprising abrasive grains; a polymer having a cationic group at the terminal; an oxidizing agent; a metal oxide-dissolving agent; and water, in which the polymer has a structural unit derived from an unsaturated carboxylic acid, a weight average molecular weight of the polymer is 20000 or less, and a pH is less than 5.0.
一种抛光液,用于对含有
钨材料的待抛光表面进行抛光,抛光液由磨粒、末端带有阳离子基团的聚合物、氧化剂、金属氧化物溶解剂和
水组成,其中聚合物的结构单元来自不饱和
羧酸,聚合物的重量平均分子量为 20000 或更小,pH 值小于 5.0。