申请人:Oh Jung-Hoon
公开号:US20100113818A1
公开(公告)日:2010-05-06
An acid generator represented by the following formula (1) is provided:
wherein X represents an alkylene group having 1 to 10 carbon atoms, —X
1
—O—X
2
—, or a heteroatom selected from the group consisting of nitrogen, sulfur and fluorine; X
1
and X
2
each independently represent an alkylene group having 1 to 10 carbon atoms; Y represents a cyclic hydrocarbon group having 5 to 30 carbon atoms and containing one or more aromatic rings, while one or more hydrogen atoms on the ring of the cyclic hydrocarbon group may be substituted by one or more members selected from the group consisting of —O—Y
1
, —CO—Y
2
, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a perfluoroalkyl group having 1 to 4 carbon atoms, a perfluoroalkoxy group having 1 to 4 carbon atoms, a hydroxyalkyl group having 1 to 6 carbon atoms, a halogen atom, a hydroxyl group and a cyano group; Y
1
and Y
2
each independently represent an alkyl group having 1 to 6 carbon atoms; n represents an integer of 0 or 5; and A
+
represents an organic counterion.
提供以下公式(1)所表示的酸发生剂:其中,X代表具有1至10个碳原子的烷基基团,-X1-O-X2-或从氮、硫和氟组成的杂原子中选择的一个;X1和X2各自独立地表示具有1至10个碳原子的烷基基团;Y表示含有5至30个碳原子并含有一个或多个芳香环的环状烃基团,环状烃基团的环上一个或多个氢原子可以被选择自-O-Y1、-CO-Y2、具有1至6个碳原子的烷基基团、具有1至6个碳原子的烷氧基团、具有1至4个碳原子的全氟烷基团、具有1至4个碳原子的全氟烷氧基团、具有1至6个碳原子的羟基烷基团、卤素原子、羟基团和氰基的一个或多个成员取代;Y1和Y2各自独立地表示具有1至6个碳原子的烷基基团;n表示0或5的整数;A+表示有机对离子。