申请人:Wako Pure Chemical Industries, Ltd.
公开号:EP1443042A1
公开(公告)日:2004-08-04
The present invention relates to a hybrid type onium salt having an iodonium salt and a sulfonium salt in the molecule, useful, for example, as a cationic type photopolymerization initiator and an acid generator for a chemically amplified resist and provides a hybrid type onium salt shown by the general formula [1]:
[wherein R1 to R3 are each independently a halogen atom, an alkyl group, a haloalkyl group, an aryl group, an alkoxy group, an aryloxy group, an alkylthio group, an arylthio group or an amino group which may be substituted; Q1 is a direct-linkage, an oxygen atom, a sulfur atom or a lower alkylene chain; T1 is an alkylene group or an arylene group, which may have a substituent selected from the group consisting of a halogen atom, an alkyl group, a haloalkyl group, an aryl group, an alkoxy group, an aryloxy group, an alkylthio group, an arylthio group and an amino group which may be substituted; and R4 is an alkyl group, an alkenyl group, an aryl group or an aralkyl group, which may have a substituent selected from the group consisting of a halogen atom, an alkyl group, a haloalkyl group, an aryl group, an alkoxy group, an aryloxy group, an alkylthio group, an arylthio group and an amino group which may be substituted or a group shown by the general formula [2]:
(wherein R5 to R7 are each independently a halogen atom, an alkyl group, a haloalkyl group, an aryl group, an alkoxy group, an aryloxy group, an alkylthio group, an arylthio group or an amino group which may be substituted; Q2 is a direct-linkage, an oxygen atom, a sulfur atom or a lower alkylene chain; T2 an alkylene group or an arylene group, which may have a substituent selected from the group consisting of a halogen atom, an alkyl group, a haloalkyl group, an aryl group, an alkoxy group, an aryloxy group, an alkylthio group, an arylthio group and an amino group which may be substituted; A3 is a counter anion; m is an integer of 0 to 4; and two ns are each independently an integer of 0 to 5); A1 and A2 are each independently a counter anion; and m and n are the same as described above], and a polymerization initiator or an acid generator, comprising said onium salt.
本发明涉及一种分子中含有碘盐和锍盐的混合型鎓盐,例如可用作阳离子型光聚合引发剂和化学放大抗蚀剂的酸发生剂,并提供了通式[1]所示的混合型鎓盐:
[其中R1至R3各自独立地为卤原子、烷基、卤代烷基、芳基、烷氧基、芳氧基、烷硫基、芳硫基或可被取代的氨基;Q1为直链、氧原子、硫原子或低级亚烷基链;T1 是亚烷基或亚芳基,其取代基可选自由卤原子、烷基、卤代烷基、芳基、烷氧基、芳氧基、烷硫基、芳硫基和可被取代的氨基组成的组;R4 是烷基、烯基、芳基或芳烷基,其取代基可选自卤原子、烷基、卤代烷基、芳基、烷氧基、芳氧基、烷硫基、芳硫基和可被取代的氨基或通式 [2] 所示的基团:
(其中 R5 至 R7 各自独立地为卤原子、烷基、卤代烷基、芳基、烷氧基、芳氧基、烷硫基、芳硫基或可被取代的氨基;Q2 为直链、氧原子、硫原子或低级亚烷基链;T2 一个亚烷基或一个亚芳基,其取代基可选自卤原子、烷基、卤代烷基、芳基、烷氧基、芳氧基、烷硫基、芳硫基和可被取代的氨基组成的组;A3为反阴离子;m为0至4的整数;两个n各自独立地为0至5的整数);A1和A2各自独立地为反阴离子;m和n与上述相同],以及包含所述鎓盐的聚合引发剂或酸发生器。