[EN] FLUORINE-FREE HETERAROMATIC PHOTOACID GENERATORS AND PHOTORESIST COMPOSITIONS CONTAINING THE SAME [FR] GÉNÉRATEURS DE PHOTOACIDES HÉTÉROAROMATIQUES EXEMPTS DE FLUOR ET COMPOSITIONS DE PHOTORÉSINE LES CONTENANT
Fluorine-free heteroaromatic photoacid generators and photoresist compositions containing the same
申请人:International Business Machines Corporation
公开号:US08034533B2
公开(公告)日:2011-10-11
Fluorine-free photoacid generators and photoresist compositions containing fluorine-free photoacid generators are enabled as alternatives to PFOS/PFAS photoacid generator-containing photoresists. The photoacid generators are characterized by the presence of a fluorine-free heteroaromatic sulfonate anionic component. The photoacid generators preferably contain an onium cationic component, more preferably a sulfonium cationic component. The photoresist compositions preferably contain an acid sensitive imaging polymer. The compositions are especially useful for forming material patterns using 193 nm (ArF) imaging radiation.
FLUORINE-FREE HETEROAROMATIC PHOTOACID GENERATORS AND PHOTORESIST COMPOSITIONS CONTAINING THE SAME
申请人:Liu Sen
公开号:US20090181320A1
公开(公告)日:2009-07-16
Fluorine-free photoacid generators and photoresist compositions containing fluorine-free photoacid generators are enabled as alternatives to PFOS/PFAS photoacid generator-containing photoresists. The photoacid generators are characterized by the presence of a fluorine-free heteroaromatic sulfonate anionic component. The photoacid generators preferably contain an onium cationic component, more preferably a sulfonium cationic component. The photoresist compositions preferably contain an acid sensitive imaging polymer. The compositions are especially useful for forming material patterns using 193 nm (ArF) imaging radiation.
[EN] FLUORINE-FREE HETERAROMATIC PHOTOACID GENERATORS AND PHOTORESIST COMPOSITIONS CONTAINING THE SAME<br/>[FR] GÉNÉRATEURS DE PHOTOACIDES HÉTÉROAROMATIQUES EXEMPTS DE FLUOR ET COMPOSITIONS DE PHOTORÉSINE LES CONTENANT
申请人:IBM
公开号:WO2009091702A1
公开(公告)日:2009-07-23
Fluorine-free photoacid generators and photoresist compositions containing fluorine-free photoacid generators are enabled as alternatives to PFOS/PFAS photoacid generator-containing photoresists. The photoacid generators are characterized by the presence of a fluorine-free heteroaromatic sulfonate anionic component. The photoacid generators preferably contain an onium cationic component, more preferably a sulfonium cationic component. The photoresist compositions preferably contain an acid sensitive imaging polymer. The compositions are especially useful for forming material patterns using 193nm (ArF) imaging radiation.