Direct UV-written highly fluorinated aromatic-aliphatic copolyethers for optical waveguides
作者:Ying Wan、Yang Zhang、Zuosen Shi、Wenhui Xu、Xiaolong Zhang、Lisha Zhao、Zhanchen Cui
DOI:10.1016/j.polymer.2011.12.021
日期:2012.2
(Me-HQ)/(12F-diol) were obtained. The chemical structures of all the copolymers were analyzed by 1H NMR, 13C NMR and 19F NMR spectra. A series of highly fluorinated photoresists were prepared by composing of fluorinated copolyethers, diphenyliodonium salt as a photoacid generator (PAG) and solvent. After UV-curing, the cross-linked films exhibited excellent chemical resistance and high thermal stability (Td ranged from
制备了双酚单体(4-甲氧基)苯氢醌(Me-HQ),并进一步与2,2,3,3,4,4,5,5,6,6,7,7-dodeca-fluoro-1聚合, 8-辛二醇(12F-二醇)和十氟联苯(DFBP),得到含有甲氧基的高度氟化的芳族脂肪族共聚醚。经过脱甲基和与环氧氯丙烷的反应后,获得了一系列新型的高氟化芳族脂族共聚醚,它们在(Me-HQ)/(12F-二醇)的不同进料比下带有环氧基(FA-APE EP)。所有共聚物的化学结构均通过1 H NMR,13 C NMR和19F NMR谱。通过将氟化共聚醚,作为光酸产生剂(PAG)的二苯基碘鎓盐和溶剂组成,制备了一系列高度氟化的光致抗蚀剂。紫外线固化后,该交联膜表现出优异的耐化学性和高的热稳定性(T d为230至278°C)。通过改变共聚单体的进料比,可以在1550nm下将膜的折射率控制在1.5127和1.4749之间。通过直接暴露于紫外线和化学显影获得了