FLUORINE-CONTAINING ADAMANTANE DERIVATIVE, FLUORINE-CONTAINING ADAMANTANE DERIVATIVE HAVING POLYMERIZABLE GROUP, RESIN COMPOSITION CONTAINING THE SAME, AND ANTIREFLECTION FILM
申请人:Idemitsu Kosan Co., Ltd.
公开号:EP2014639A1
公开(公告)日:2009-01-14
To provide a polymerizable group-containing and fluorine-containing adamantane derivative capable of affording a cured product having good heat resistance, good mechanical properties such as mar resistance and a low refractive index, a resin composition containing such a polymerizable group-containing adamantane derivative, and a fluorine-containing adamantane derivative which is useful as a reaction intermediate used for the production of the polymerizable group-containing and fluorine-containing adamantane derivative.
Specifically provided are a fluorine-containing adamantane derivative represented by the general formula (I) below, a polymerizable group-containing and fluorine-containing adamantane derivative represented by the general formula (II) below, and a resin composition containing such a polymerizable group-containing and fluorine-containing adamantane derivative. In the formula, R1 and R2 are each a hydrogen atom, for example, n is an integer of 0 or more, X1 is a polymerizable group represented by the formula (III-a), for example, Y is a hydrogen atom, for example, s and t are each an integer of 1 to 15, and u is an integer of 0 to 14, with the proviso that s + t + u = 16.
提供一种含聚合基团和含氟的金刚烷衍生物,能够提供具有良好耐热性、良好机械性能(如耐磨性)和低折射率的固化产物,包含该聚合基团含有金刚烷衍生物的树脂组合物,以及作为用于生产含聚合基团和含氟的金刚烷衍生物的反应中间体的氟化金刚烷衍生物。具体提供了以下通用公式(I)所表示的氟化金刚烷衍生物,以下通用公式(II)所表示的聚合基团含有和含氟的金刚烷衍生物,以及含有这种聚合基团含有和含氟的金刚烷衍生物的树脂组合物。在公式中,R1和R2分别是氢原子,例如,n是大于等于0的整数,X1是由公式(III-a)表示的聚合基团,例如,Y是氢原子,例如,s和t分别是1到15的整数,u是0到14的整数,但须满足s + t + u = 16。
MATERIAL FOR RESIST PROTECTIVE FILM FOR IMMERSION LITHOGRAPHY
申请人:Takebe Yoko
公开号:US20090061360A1
公开(公告)日:2009-03-05
To provide a resist protective film material for immersion lithography.
An alkali soluble resist protective film material for immersion lithography, which comprises a polymer (F) containing repeating units (F
U
) formed by polymerizing a polymerizable compound (f
m
) having a fluorine-containing bridged cyclic structure. For example, repeating units (F
U
) are repeating units formed by polymerizing a compound (f) selected from the group consisting of the following formulae (f1) to (f4) (R
F
represents H, F, a C
1-3
alkyl group or a C
1-3
fluoroalkyl group, and X
F
represents F, OH or CH
2
OH.)