An object of the present invention is to provide a new cleaning agent composition having excellent cleaning power for the surface contamination of a semiconductor wafer or various precisely worked instruments made of glass or ceramic, which is used in the manufacture of wafer; a method for cleaning a wafer; a semiconductor wafer having a surface cleaned by a cleaning method; and a method for manufacturing a semiconductor wafer. A semiconductor wafer is cleaned using a cleaning agent composition including a specific fluorine-containing anionic surfactant, a quaternary ammonium hydroxide and/or an alkanolamine.
本发明的目的是提供一种新的清洗剂组合物,该组合物对半导体晶片或用于制造晶片的各种由
玻璃或陶瓷制成的精密加工器械的表面污染具有极佳的清洗能力;一种清洗晶片的方法;一种通过清洗方法清洗表面的半导体晶片;以及一种制造半导体晶片的方法。半导体晶片使用清洁剂组合物进行清洁,该清洁剂组合物包括特定的含
氟阴离子表面活性剂、季
铵氢氧化物和/或烷醇胺。