申请人:SHIN-ETSU CHEMICAL CO., LTD.
公开号:US09164384B2
公开(公告)日:2015-10-20
A negative pattern is formed by coating a resist composition comprising a polymer comprising recurring units of formulae (1) and (2) and a photoacid generator of formula (3) onto a substrate, baking, exposure, PEB and developing in an organic solvent. In formulae (1) and (2), R1 is H, F, CH3 or CF3, Z is a single bond, phenylene, naphthylene, or (backbone)-C(═O)—O—Z′—, Z′ is alkylene, phenylene or naphthylene, XA is an acid labile group, YL is H or a polar group. In formula (3), R2 and R3 are a monovalent hydrocarbon group, R4 is a divalent hydrocarbon group, or R2 and R3, or R2 and R4 may form a ring with the sulfur, L is a single bond or a divalent hydrocarbon group, Xa and Xb are H, F or CF3, and k is an integer of 1 to 4.
一种负型图案的制备方法,包括将一种包含由式(1)和(2)的重复单元组成的聚合物和式(3)的光酸发生剂的抗蚀剂组合物涂覆在基板上,烘烤,曝光,PEB和在有机溶剂中显影。在式(1)和(2)中,R1为H,F,
CH3或
CF3,Z为单键,苯基,
萘基或(骨架)-C(═O)-O-Z′-,Z′为烷基,苯基或
萘基,XA为酸敏感基团,YL为H或极性基团。在式(3)中,R2和R3为单价烃基,R4为二价烃基,或R2和R3,或R2和R4可以与
硫形成环,L为单键或二价烃基,Xa和Xb为H,F或 ,k为1到4的整数。