A resist composition including a resin component having a structural unit derived from a compound represented by formula (a0-1), in which W represents a polymerizable group-containing group; Ra
01
represents an alkyl group or an aromatic heterocyclic group containing an oxygen atom or a sulfur atom; in the case where Ra
01
is an aromatic heterocyclic group containing an oxygen atom or a sulfur atom, Ra
02
is a group which forms an aliphatic cyclic group containing an electron-withdrawing group, together with the tertiary carbon atom (*C) to which Ra
01
is bonded; and when Ra
01
is an alkyl group, Ra
02
is a group in which an aliphatic cyclic group containing an electron-withdrawing group forms a condensed ring together with an aromatic heterocyclic group containing an oxygen atom or a sulfur atom.
一种抗蚀组合物,包括具有由公式(a0-1)所代表的化合物衍生的结构单元的
树脂组分,其中W代表含有聚合基团的基团;Ra01代表含有氧原子或
硫原子的烷基或芳香杂环基团;在Ra01为含有氧原子或
硫原子的芳香杂环基团的情况下,Ra02是与Ra01连接的三级碳原子(*C)一起形成含有电子提取基团的脂环基团的基团;而当Ra01为烷基时,Ra02是含有电子提取基团的脂环基团与含有氧原子或
硫原子的芳香杂环基团形成的紧缩环。