MATERIALS FOR POLISHING LIQUID FOR METAL, POLISHING LIQUID FOR METAL, METHOD FOR PREPARATION THEREOF AND POLISHING METHOD USING THE SAME
申请人:Hitachi Chemical Company, Ltd.
公开号:EP1150341A1
公开(公告)日:2001-10-31
Provided are a metal-polishing liquid that comprises an oxidizing agent, an oxidized-metal etchant, a protective film-forming agent, a dissolution promoter for the protective film-forming agent, and water; a method for producing it; and a polishing method of using it. Also provided are materials for the metal-polishing liquid, which include an oxidized-metal etchant, a protective film-forming agent, and a dissolution promoter for the protective film-forming agent.
本发明提供了一种金属抛光液,它由氧化剂、氧化金属蚀刻剂、保护膜形成剂、保护膜形成剂的溶解促进剂和水组成;还提供了一种生产方法和一种抛光方法。此外,还提供了用于金属抛光液的材料,其中包括氧化金属蚀刻剂、保护膜形成剂和保护膜形成剂的溶解促进剂。