[EN] PHOTOACID GENERATORS AND PHOTORESISTS COMPRISING SAME<br/>[FR] GENERATEURS D'ACIDES PHOTOSENSIBLES ET PHOTORESISTS COMPRENANT CES DERNIERS
申请人:SHIPLEY CO LLC
公开号:WO2001063363A2
公开(公告)日:2001-08-30
New photoacid generator compounds ('PAGs') are provided and photoresist compositions that comprise such compounds. In particular, non-ionic substituted disulfone compounds PAGS are provided, including disulfone PAGs that contain a diazo, substituted methylene or hydrazine moiety interposed between substituted sulfone groups. Also provided are positive- and negative-acting chemically amplified resists that contain such PAGs and that are preferably imaged with sub-300 nm or sub-200 nm radiation such as 248 nm, 193 nm, or 157 nm radiation.