The present invention provide an adhesive sheet for electrostatic chucking device having high heat resistance and to an electrostatic chucking device which causes little curvature of the ceramic board after application of heat and is excellent in heat resistance and adsorptity. The adhesive sheet of the present invention comprises a silicone resin elastic layer
11
and thermosetting adhesive layers
12
and
13
which are each laminated on the silicone resin elastic layer, wherein said thermosetting adhesive layers are composed of epoxy resin or phenol resin. The electrostatic chucking device of the present invention is produced by laminating an electrode and a ceramic layer having an adsorptive surface on a metal base in this order via the adhesive sheet of the present invention.
本发明提供了一种具有高耐热性的静电吸盘装置用胶片,以及一种加热后陶瓷板几乎不弯曲、耐热性和吸附性极佳的静电吸盘装置用胶片。本发明的粘合板包括
硅树脂弹性层
11
和热固性粘合剂层
12
和
13
分别层压在
硅树脂弹性层上,其中所述热固性粘合剂层由环氧
树脂或
酚醛
树脂构成。本发明的静电夹持装置是通过本发明的粘合剂层将电极和具有吸附表面的陶瓷层依次层压在
金属底座上制成的。