lithium salts of hexamethylcyclotri- and octa-methylcyclotetrasilazanes with silicontetrafluoride and organo-substituted silicon fluorides. Disubstituted compounds are obtained by the reaction of dilithium hexamethylcyclotrisilazane with silicon fluorides or by the reaction of lithium hexamethylcyclotrisilazane with silicon fluorides at higher temperature. Cyclosilazanes with bulky ligands react with