Additive for resist underlayer film-forming composition and resist underlayer film-forming composition containing the same
申请人:NISSAN CHEMICAL INDUSTRIES, LTD.
公开号:US10795261B2
公开(公告)日:2020-10-06
An additive for a resist underlayer film-forming composition, including a copolymer having structural units of the following Formulae (1) to (3):
wherein R1s are each independently a hydrogen atom or a methyl group, R2 is a C1-3 alkylene group, A is a protecting group, R3 is an organic group having 4 to 7-membered ring lactone skeleton, adamantane skeleton, tricyclodecane skeleton, or norbornane skeleton, and R4 is a linear, branched, or cyclic organic group having a carbon atom number of 1 to 12, wherein at least one hydrogen atom is substituted with a fluoro group and that optionally has at least one hydroxy group as a substituent. A resist underlayer film-forming composition for lithography including additive, a resin that is different from copolymer, organic acid, crosslinker, and solvent, wherein the copolymer's content is 3 parts by mass to 40 parts by mass relative to 100 parts by mass of the resin.
一种用于抗蚀剂底层成膜组合物的添加剂,包括一种具有下式(1)至(3)结构单元的共聚物:
其中 R1s 各自独立地为氢原子或甲基,R2 为 C1-3 亚烷基,A 为保护基,R3 为具有 4 至 7 元环内酯骨架、金刚烷骨架、三环癸烷骨架或降冰片烷骨架的有机基团,R4 为具有 1 至 12 个碳原子数的线性、支链或环状有机基团,其中至少一个氢原子被氟基团取代,且可选择具有至少一个羟基作为取代基。一种光刻用抗蚀剂底层成膜组合物,包括添加剂、不同于共聚物的树脂、有机酸、交联剂和溶剂,其中共聚物的含量相对于 100 质量份的树脂为 3 至 40 质量份。