An additive for a resist underlayer film-forming composition containing a copolymer having structural units of Formulae (1) to (4), and a resist underlayer film-forming composition containing the additive:
(where each R1 is independently a hydrogen atom or methyl group, Ar is arylene group, Pr is a protecting group or a hydrogen atom, X is a direct bond or a —C(═O)O—R2— group, R2 constituting the —C(═O)O—R2— group is a C1-3 alkylene group, the alkylene group is bonded to a sulfur atom, R3 is a hydrogen atom, methyl group, methoxy group, or halogeno group, R4 is a C1-3 alkyl group in which at least one hydrogen atom is substituted with a fluoro group, and Z is an organic group having 4 to 7-membered ring lactone skeleton, adamantane skeleton, or norbornane skeleton).
一种用于抗蚀剂底层成膜组合物的添加剂,该组合物含有具有式(1)至(4)结构单元的共聚物,以及一种含有该添加剂的抗蚀剂底层成膜组合物:
(其中每个 R1 独立地为氢原子或甲基,Ar 为芳基,Pr 为保护基团或氢原子,X 为直接键或-C(═O)O-R2-基团,构成-C(═O)O-R2-基团的 R2 为 C1-3 亚烷基,亚烷基与
硫原子键合、R3 是氢原子、甲基、甲氧基或卤代基团,R4 是至少一个氢原子被
氟基团取代的 C1-3 烷基,Z 是具有 4-7 元环内酯骨架、
金刚烷骨架或降
冰片烷骨架的有机基团)。