[EN] ORGANOMETALLIC COMPOUNDS FOR THE MANUFACTURE OF A SEMICONDUCTOR ELEMENT OR ELECTRONIC MEMORY<br/>[FR] COMPOSÉS ORGANOMÉTALLIQUES POUR LA FABRICATION D'UN ÉLÉMENT SEMI-CONDUCTEUR OU D'UNE MÉMOIRE ÉLECTRONIQUE
申请人:UMICORE AG & CO KG
公开号:WO2020021083A1
公开(公告)日:2020-01-30
The invention relates to compounds in accordance with the general formula [Ru(arene)(Ra-N=CR1-CR3=N-Rb)] or [Ru(arene)((Rc,Rd)N-N=CRH1-CRH3=N-N(Re,Rf))]. In this case, arene is selected from the group consisting of mononuclear and polynuclear arenes and heteroarenes. R1, R3, RH1, RH3 and Ra - Rf are independently selected from the group consisting of H, an alkyl radical (C1 - C10) and an aryl radical. It further relates to methods for the production of these compounds, compounds obtainable according to these methods, their use and a substrate having on a surface thereof a ruthenium layer or a layer containing ruthenium. In addition, the invention relates to a method for producing compounds [Ru(arene)X2]2, wherein arene is selected from the group consisting of mononuclear and polynuclear arenes and X = halogen, compounds of this type obtainable according to this method, and their use. The aforementioned ruthenium(O) compounds can be produced in a simple, cost- effective and reproducible manner with a high degree of purity and good yield. Due to their high degree of purity, they are suitable for use as ruthenium(O) precursors.
该发明涉及符合一般式[Ru(芳烃)(Ra-N=CR1-CR3=N-Rb)]或[Ru(芳烃)((Rc,Rd)N-N=CRH1-CRH3=N-N(Re,Rf))]的化合物。在这种情况下,芳烃被选自包括单核和多核芳烃以及杂环芳烃的组。R1、R3、RH1、RH3和Ra - Rf独立地选自包括H、烷基基团(C1 - C10)和芳基基团的组。它还涉及这些化合物的生产方法、根据这些方法可获得的化合物、它们的用途以及在表面上具有钌层或含钌的层的基底。此外,该发明涉及一种生产化合物[Ru(芳烃)X2]2的方法,其中芳烃被选自包括单核和多核芳烃,X = 卤素,按照该方法可获得的这类化合物及其用途。上述钌(O)化合物可以以简单、经济高效且可重复的方式生产,具有高纯度和良好的产率。由于其高纯度,它们适用于用作钌(O)前体。