Polymers comprising monomeric units of acid sensitive (acid labile) monomers and from about 2 to about 20% by weight of monomeric units of &bgr;-oxo ester containing monomers, wherein the &bgr;-oxo ester containing monomers are free of lactams or lactones, are useful as binder resins in radiation sensitive photoresist compositions for producing a resist image on a substrate.
含有酸敏感(易酸解)单体单位和约2至约20%重量的β-氧
酮酯单体单位的高分子聚合物,其中β-氧
酮酯单体单位不含内酰胺或内酯,可用作辐射敏感的光刻胶组合物中的粘合剂
树脂,用于在基板上产生抗蚀图像。