A non-ionic photoacid generator and a chemically amplified positive-type photoresist composition for a thick film including the non-ionic photoacid generator. The non-ionic photoacid generator may not only exhibit high solubility in a solvent of the photoresist composition, but may also exhibit chemical and thermal stability and high sensitivity. In particular, the non-ionic photoacid generator is decomposed by light to generate an acid, and at the same time, can exhibit a corrosion preventing effect on a metal substrate.
一种非离子光酸发生器和一种用于厚膜的
化学放大正型光刻胶组合物,包括该非离子光酸发生器。非离子光酸发生器不仅在光刻胶组合物的溶剂中具有高溶解性,还具有
化学稳定性、热稳定性和高灵敏度。特别是,非离子光酸发生器在光的作用下分解生成酸,同时还能对
金属基底起到防腐蚀作用。