申请人:E. I du Pont de Nemours and Company
公开号:US07084314B1
公开(公告)日:2006-08-01
Polycyclic fluoroalkanes that are highly transparent to UV wavelengths ranging from about 190 nm to 260 nm are provided. The polycyclic fluoroallkanes are suitable for use in a variety of applications, particularly in the vacuum UV and deep UV region of the electromagnetic spectrum. For example, the polycyclic fluoroalkanes are useful in optical couplants, optical cements, optical elements, optical inspection media for semiconductor wafers and devices, and immersion photolithography, particularly at 193 and 248 nm exposure wavelength.
提供了对紫外波长范围从约190纳米到260纳米高度透明的多环氟烷。这些多环氟烷适用于各种应用,特别是在电磁波谱的真空紫外和深紫外区域。例如,这些多环氟烷在光学耦合剂、光学水泥、光学元件、半导体晶圆和器件的光学检测介质以及浸没光刻等方面非常有用,特别是在193和248纳米的曝光波长下。