Hydroxyphenylbenzene derivatives as glass forming molecules for high resolution photoresists
作者:Anuja De Silva、Christopher K. Ober
DOI:10.1039/b719108a
日期:——
This paper presents a fundamental study to relate molecular architecture to the amorphous properties of hydroxyphenylbenzene molecular glass derivatives. These studies demonstrates that the branched hydroxyphenylbenzene derivatives can form stable molecular glasses despite the π–π interactions present. Through this research, design concepts to stabilize the amorphous nature and to increase the glass transition temperature (Tg) based on asymmetric molecular structures, bulky substituents, conformation states and molecular size are explored. An understanding of such behavior is important for the development of hydroxyphenylbenzene derivatives as potential molecular photoresists for patterning below 50 nm. This research has helped to identify potential candidates to be evaluated as positive-tone photoresists for lithographic applications for extreme ultraviolet (EUV, λ = 13.4 nm) lithography. The first reported sub-30 nm feature sizes for hydroxyphenylbenzene derivatives were demonstrated with high Tg materials.
本文通过基础研究,探讨了羟基苯基苯分子玻璃衍生物的分子结构与其非晶性质之间的关系。研究表明,尽管存在π-π相互作用,分枝羟基苯基苯衍生物仍能形成稳定的分子玻璃。通过这项研究,探索了基于不对称分子结构、庞大取代基、构象状态和分子尺寸来稳定非晶性质和提高玻璃化转变温度(Tg)的设计概念。对于开发潜在的分子光刻胶,用于50 nm以下图案化的羟基苯基苯衍生物,理解这种行为至关重要。这项研究有助于识别潜在候选物质,作为极紫外(EUV,波长=13.4 nm)光刻技术的正色调光刻胶。首次展示了Tg高的羟基苯基苯衍生物的亚30 nm特征尺寸。