Image quality improvement using helium gas in low voltage variable pressure scanning electron microscopy
作者:E. Oho、N. Asai、S. Itoh
DOI:10.1093/oxfordjournals.jmicro.a023869
日期:2000.1.1
An effective combination of the low voltage and variable pressure (VP) scanning electron microscopy (SEM) are discussed. In low voltage VP-SEM, helium gas is utilized for reducing the amount of scatter of the primary electron beam. Most samples can receive various benefits obtained from the combination of low voltage and low vacuum observation. Compared to a back-scattered electron (BSE) image in air, signal-to-noise ratio (SNR) of a BSE image taken with helium gas is 5.4 times under a pressure of 50 Pa and an accelerating voltage of 1.5 kV.
本文讨论了低压和变压扫描电子显微镜(SEM)的有效结合。在低压变压扫描电子显微镜中,氦气被用来减少主电子束的散射量。大多数样品都能从低电压和低真空的组合观测中获得各种益处。与空气中的背散射电子(BSE)图像相比,在 50 Pa 的压力和 1.5 kV 的加速电压下,用氦气拍摄的 BSE 图像的信噪比(SNR)是空气中的 5.4 倍。