申请人:Shin-Etsu Chemical Co., Ltd.
公开号:US10474030B2
公开(公告)日:2019-11-12
A resist composition comprising a base polymer and a metal salt of carboxylic acid or sulfonamide is provided, the metal being selected from calcium, strontium, barium, cerium, aluminum, indium, gallium, thallium scandium, and yttrium. The resist composition exhibits a sensitizing effect and an acid diffusion suppressing effect and forms a pattern having improved resolution, LWR and CDU.
本发明提供了一种抗蚀剂组合物,它由基质聚合物和羧酸或磺酰胺的金属盐组成,金属选自钙、锶、钡、铈、铝、铟、镓、铊钪和钇。抗蚀剂组合物具有敏化效果和酸扩散抑制效果,并能形成具有更高分辨率、LWR 和 CDU 的图案。