POLYMER, RESIST COMPOSITION, AND PATTERN FORMING PROCESS
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:US20160229940A1
公开(公告)日:2016-08-11
A polymer comprising recurring units having an acid generator bound to the backbone, and recurring units having an optionally acid labile group-substituted carboxyl group and/or recurring units having an optionally acid labile group-substituted hydroxyl group is obtained by polymerizing corresponding monomers in a solution of a non-polymerizable compound containing a nitrogen atom to which an acid labile group is bound. This prevents deprotection reaction of the acid labile group in the case of positive resist-forming polymer or crosslinking reaction in the case of negative resist-forming polymer.
METHOD FOR PRODUCING POLYMER
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:US20170097567A1
公开(公告)日:2017-04-06
A polymer comprising recurring units having an acid generator bound to the backbone, and recurring units having an optionally acid labile group-substituted carboxyl group and/or recurring units having an optionally acid labile group-substituted hydroxyl group is obtained by polymerizing corresponding monomers in a solution of a non-polymerizable compound containing a nitrogen atom to which an acid labile group is bound. This prevents deprotection reaction of the acid labile group in the case of positive resist-forming polymer or crosslinking reaction in the case of negative resist-forming polymer.
US6362201B1
申请人:——
公开号:US6362201B1
公开(公告)日:2002-03-26
[EN] 3-CYCLOPROPYL AND 3-CYCLOBUTYL PYRROLIDINE MODULATORS OF CHEMOKINE RECEPTOR ACTIVITY<br/>[FR] MODULATEURS DE L'ACTIVITE RECEPTEUR DES CHIMIOKINES, A BASE DE 3-CYCLOPROPYLE ET 3-CYCLOBUTYLE
申请人:MERCK & CO INC
公开号:WO2000051607A1
公开(公告)日:2000-09-08
The present invention is directed to pyrrolidine compounds of the formula (I) (wherein R?1, R2, R3, R4c, R4d, and R4f¿ are defined herein) which are useful as modulators of chemokine receptor activity. In particular, these compounds are useful as modulators of the chemokine receptors CCR-3 and/or CCR-5.