SPHERICAL INORGANIC PARTICLES HAVING SURFACE BUMPS FORMED THEREON, AND METHOD OF MANUFACTURING SAME
申请人:Bead Origin Inc.
公开号:EP3957699A2
公开(公告)日:2022-02-23
The inorganic particle according to the present invention is composed of aggregation of crystalline and amorphous small particles and has a spherical and smooth surface. The spherical appearance, low crystallinity and narrow particle size distribution of inorganic particle are more advantageous in reducing scratch defects in the CMP process. In addition, since the small particles on the surface of the inorganic particle provide more active sites, the inorganic particle has an excellent removal rate, so it is advantageous as a next-generation CMP abrasive.
本发明的无机颗粒由结晶和无定形小颗粒聚集而成,具有球形和光滑的表面。无机颗粒的球形外观、低结晶度和窄粒度分布更有利于减少 CMP 工艺中的划痕缺陷。此外,由于无机颗粒表面的小颗粒提供了更多的活性位点,无机颗粒具有极佳的去除率,因此作为下一代 CMP 研磨剂具有优势。