Fluorine-free photoacid generators and photoresist compositions containing fluorine-free photoacid generators are enabled as alternatives to PFOS/PFAS photoacid generator-containing photoresists. The photoacid generators are characterized by the presence of a fluorine-free heteroaromatic sulfonate anionic component. The photoacid generators preferably contain an onium cationic component, more preferably a sulfonium cationic component. The photoresist compositions preferably contain an acid sensitive imaging polymer. The compositions are especially useful for forming material patterns using 193 nm (ArF) imaging radiation.
无
氟光酸发生剂和含有无
氟光酸发生剂的光刻胶组合物作为PFOS/PFAS光酸发生剂含量较高的光刻胶的替代品。该光酸发生剂具有无
氟杂环
磺酸盐阴离子组分的特征。该光酸发生剂最好包含一个离子型阳离子组分,更好地是一个
磺酸盐阳离子组分。该光刻胶组合物最好包含一个酸敏感成像聚合物。该组合物特别适用于使用193nm(ArF)成像辐射形成材料图案。