[EN] 4'-ETHYNYL-2'-DEOXYADENOSINE DERIVATIVES AND THEIR USE IN HIV THERAPY [FR] DÉRIVÉS DE 4'-ÉTHYNYLE -2'-DÉSOXYADÉNOSINE ET LEUR UTILISATION EN THÉRAPIE CONTRE LE VIH
Alkoxy methyl ether and alkoxy methyl ester derivatives
申请人:SYNTEX (U.S.A.) INC.
公开号:EP0187297B1
公开(公告)日:1991-08-21
Guth, 1903, vol. 44, p. 97
作者:Guth
DOI:——
日期:——
Underlayer Coating Forming Composition for Lithography Containing Naphthalene Ring Having Halogen Atom
申请人:Takei Satoshi
公开号:US20070238029A1
公开(公告)日:2007-10-11
There is provided an underlayer coating forming composition for lithography, and an underlayer coating having a high dry etching rate compared with photoresist, and causing no intermixing with the photoresist, which are used in lithography process of manufacture of semiconductor device. Concretely, it is an underlayer coating forming composition comprising a polymer having a structural unit containing naphthalene ring substituted with halogen atom in a molar ratio of 0.3 or more in the structural units constituting the polymer, a solvent.