申请人:Nippon Soda Co., Ltd.
公开号:EP2186838A1
公开(公告)日:2010-05-19
It is to provide a star polymer that can be used as a photoresist material of photolithography processing with no linear polymer remained. After forming the core part by producing a polymer by polymerizing one or more polyfunctional (meth)acrylic acid ester derivative represented by formula (IV)
(wherein R represents a hydrogen atom, etc. , n represents 2 or 3, and A represents an organic group linking at a carbon atom) by anionic polymerization in an organic solvent, in the presence of 0.1 to 0.99 mol of organic alkali metal compound with respect to 1 mol of the compound of the formula (IV), and in the presence of 0.1 to 20 mol of inorganic salts of alkali metal or alkali earth metal with respect to 1 mol of the organic alkali metal compound, the arm part is formed by polymerizing one or more monofunctional (meth)acrylic acid ester derivative represented by formula (I)
(wherein R1 represents a hydrogen atom, etc., and R2 represents an organic group) by anionic polymerization from the anionic active site of the core part.
其目的是提供一种星形聚合物,可用作光刻加工的光刻胶材料,且不残留线性聚合物。通过聚合一种或多种由式(IV)表示的多官能度(甲基)丙烯酸酯衍生物来生产聚合物,从而形成核心部分。
(其中 R 代表氢原子等式(IV)代表的一种或多种多官能团(甲基)丙烯酸酯衍生物(其中R代表氢原子等,n代表2或3,A代表连接在碳原子上的有机基团)在有机溶剂中,在0.1至0.99摩尔有机碱金属化合物(相对于1摩尔式(IV)化合物)和0.1至20摩尔碱金属或碱土金属的无机盐(相对于1摩尔有机碱金属化合物)的情况下,通过聚合一种或多种由式(I)代表的单官能团(甲基)丙烯酸酯衍生物,形成臂部分。
(其中 R1 代表氢原子等,R2 代表有机基团)通过阴离子聚合从核心部分的阴离子活性位点形成。